We can supply Hydrogen Mass Flow Meter Micro Gas Mass Flow Controller Silane Flow Meter

Technical Parameter

FLOWMETER

Medium:Suitable for gases, weakly corrosive gases such as: nitrogen, air, not suitable for ammonia

Accuracy :+/-1.0%

linearity:+/-0.5%F.S

Repeatability:+/-0.2%F.S

Response time:<1.5s

Communication:RS232/485,MODBUS(Digital)

Output:0~5V,1~5V,4-20mA

Power supply:+/-15VDC,24VDC

Temperature:0~50°C

Work pressure:<0.01Mpa

Maximum withstand pressure:3Mpa/10Mpa

Electrical interfaces:DB15hole

Leakage rate:1×10^-9SCCSHe

Temperature coefficient:+/-0.025%F.S/°C

Base Material:SS316L

Sealing material:Viton, neoprene, nitrile

Joint:∅03,∅06,1/8”,1/4′

CONTROLLER

Medium:Suitable for gases, weakly corrosive gases such as: nitrogen, air, not suitable for ammonia

Accuracy :+/-1.5%F.S

linearity:+/-0.5%F.S

Repeatability:+/-0.2%F.S

Response time:<2.0s

Communication:RS232/485,MODBUS

Output:0~5V,1~5V,4-20mA

Power supply:+/-15VDC,24VDC

Temperature:0~50°C

Work pressure:Differential Pressure:0.1~0.5Mpa

Maximum withstand pressure:3Mpa/10Mpa

Electrical interfaces:DB15hole

Leakage rate:1×10^-9SCCSHe

Temperature coefficient:+/-0.025%F.S/°C

Base Material:SS316L

Sealing material:Viton, neoprene, nitrile

Joint:∅8,∅10,∅12

CX-GMFM flow range
NOTE: THE CONTROLLER IS THE SAME AS THE FLOW METER

Features

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